| Active axis | Motor type | Stroke | Velocity |
| X axis | Linear 3-phase | 50mm(±25) | 1m/s |
| Acceleration | Encoder | Repeatability | Peak force |
| 1G | 0.1 / 0.5 / 1μm | ±5 pulse | 9N / Normal force : 4N |
| Peak current | Pole Pitch N-N | MAX temperature | Resistance |
| 4.5A / Normal current : 2A | 23.5mm | 80°C | 4.3Ω |
| Inductance | Guide | ||
| 0.52mH | Cross roller |
